Design, Simulation, and Characterization of MEMS-Based Slot Waveguides
نویسندگان
چکیده
This contribution presents a design approach as well characterization results for dielectric slot waveguides fabricated in highly resistive (HR) silicon (HR-Si) designed operation the terahertz (THz) frequency range. The authors discuss fundamentals of and respective figures merit. Furthermore, analytical solutions numerical from field simulations propagating mode are presented discussed. Prototypes process HR-Si microelectromechanical systems (MEMSs), including silicon-based metamaterial to mechanically support waveguide while preserving strong confinement. In addition, actuator concepts implement device functionalities, such phase shifting capabilities, demonstrated. prototypes measured characterized using vector network analyzer (VNA)-based two-port measurements range 220 330 GHz. devices terms their confinement, loss, effective index. For first time, report on experimental validation this provide values obtained losses.
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ژورنال
عنوان ژورنال: IEEE Transactions on Microwave Theory and Techniques
سال: 2023
ISSN: ['1557-9670', '0018-9480']
DOI: https://doi.org/10.1109/tmtt.2023.3255589